CONTROL OF MODE PROFILES IN PROTON-DIFFUSED LINBO3 WAVE-GUIDES USING SELF-ALIGNED SIO2 CLADDING

被引：10

作者：

SON, YS

LEE, HJ

SHIN, SY

机构：

[1] Department of Electrical Engineering, Korea Advanced Institute of Science and Technology

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1990年 / 2卷 / 03期

关键词：

D O I：

10.1109/68.50884

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Channel waveguides are fabricated in LiNbO3 by proton diffusion with a self-aligned SiO2-cladding structure. Proton diffusion in width and depth directions is amenable to process parameters, so that it provides a simple method for control of mode profiles. Using this method, we have achieved symmetric depth mode profiles and an aspect ratio of 1.15 at λ = 0.6328 µm for efficient fiber-to-waveguide coupling. © 1990 IEEE

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页码：184 / 186

页数：3

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