INFLUENCE OF AN RF PLASMA ON THE OPTICAL AND STRUCTURAL-PROPERTIES OF VACUUM-DEPOSITED DIELECTRIC COATINGS

被引：1

作者：

HERRMANN, R

LOTZ, HG

MULLER, J

MUNZ, WD

VOGT, H

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(85)90204-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：351 / 364

页数：14

共 13 条

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