PROPERTIES OF POLYMERIC LAYERS OF AMORPHOUS HYDROGENATED CARBON PRODUCED BY A PLASMA-ACTIVATED CHEMICAL VAPOR-DEPOSITION PROCESS .1. SPECTROSCOPIC INVESTIGATIONS

被引：45

作者：

MEMMING, R

机构：

来源：

THIN SOLID FILMS | 1986年 / 143卷 / 03期

关键词：

D O I：

10.1016/0040-6090(86)90181-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：279 / 289

页数：11

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