SIMULTANEOUS BORON AND HYDROGEN PROFILING IN GAS-PHASE-DOPED HYDROGENATED AMORPHOUS-SILICON

被引：9

作者：

READ, PM ^{[1
]}

SOFIELD, CJ ^{[1
]}

FRANKS, MC ^{[1
]}

SCOTT, GB ^{[1
]}

THWAITES, MJ ^{[1
]}

机构：

[1] BP RES CTR,DIV NEW TECHNOL,SUNBURY THAMES TW16 7LN,MIDDX,ENGLAND

来源：

关键词：

D O I：

10.1016/0040-6090(83)90243-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：251 / 261

页数：11

共 8 条

[1] On the decrease of velocity of swiftly moving electrified particles in passing through matter
Bohr, N.
[J]. PHILOSOPHICAL MAGAZINE, 1915, 30 (175-80) : 581 - 612
[2] THEORETICAL ANALYSIS OF ENERGY-SPECTRA OF BACKSCATTERED IONS
BRICE, DK
[J]. THIN SOLID FILMS, 1973, 19 (01) : 121 - 135
[3] LEWIS MB, 1979, ORNLTM6697 REP
[4] NORTHCLIFFE LC, 1970, NUCL DATA TABLES A, V3
[5] PARKER DJ, 1981, AERE R10371 AT EN RE
[6] READ PM, 1981, UNPUB
[7] SMALL-ANGLE MULTIPLE-SCATTERING OF IONS IN SCREENED COULOMB REGION .1. ANGULAR-DISTRIBUTIONS
SIGMUND, P
WINTERBO.KB
[J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 119 (03): : 541 - 557
[8] ZIEGLER JF, 1980, STOPPING CROSS SECTI