TI-X-RAY AND BE-X-RAY MASKS WITH ALIGNMENT WINDOWS FOR THE LIGA PROCESS

被引：14

作者：

SCHOMBURG, WK

BAVING, HJ

BLEY, P

机构：

[1] DEGUSSA AG, Hanau

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 13卷 / 1-4期

关键词：

X-Ray Apparatus;

D O I：

10.1016/0167-9317(91)90103-K

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

X-ray masks with up to 10-mu-m high absorbers made from gold and mask membranes made from titanium and beryllium fulfil the special requirements of the LIGA process. For titanium mask blanks a special technique has been developed to transfer the PVD-membrane form the substrate to a rigid frame. To adjust the X-ray masks optically, the metallic membrane is selectively etched under a self-supporting alignment mark.

引用

页码：323 / 326

页数：4

共 7 条

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[3]

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[4]

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[5]

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[7]

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