INFLUENCE OF THE BARRIER PREPARATION ON THE QUALITY OF NBN/MGO/NBN JOSEPHSON-JUNCTIONS

被引：4

作者：

DAVID, B

DOSSEL, O

KURSTEN, G

RABE, G

机构：

[1] Philips GmbH, Forschungslab, Hamburg

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 1991年 / 4卷 / 09期

关键词：

D O I：

10.1088/0953-2048/4/9/007

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

NbN/MgO/NbN Josephson tunnel junctions have been prepared using various barrier preparation conditions. The energy of the sputtered MgO particles arriving at the substrate was found to be the most important parameter. Tunnel junctions (10 x 10-mu-m2) with V(m) values of up to 23 mV have been fabricated. The optimized NbN/MgO/NbN junction process is extended to a reliable whole-wafer process for DC SQUID fabrication.

引用

收藏

页码：409 / 412

页数：4

相关论文

共 8 条

[1]

DOESSEL O, 1991, IN PRESS SQUID 91

[2] NBN/MGO/NBN EDGE-GEOMETRY TUNNEL-JUNCTIONS [J].

HUNT, BD ;

LEDUC, HG ;

CYPHER, SR ;

STERN, JA ;

JUDAS, A .

APPLIED PHYSICS LETTERS, 1989, 55 (01) :81-83

[3] AN ALL REFRACTORY NBN JOSEPHSON JUNCTION MEDIUM SCALE INTEGRATED-CIRCUIT PROCESS [J].

KERBER, GL ;

COOPER, JE ;

FRY, HW ;

KING, GR ;

MORRIS, RS ;

SPARGO, JW ;

TOTH, AG .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (09) :4853-4860

[4] NBN, NB DOUBLE-LAYERED BASE-ELECTRODE JOSEPHSON-JUNCTIONS [J].

KOSAKA, S ;

KOJIMA, K ;

SHINOKI, F ;

SHOJI, A ;

HAYAKAWA, H .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1982, 21 (01) :319-324

[5] FABRICATION AND PERFORMANCE OF ALL NBN JOSEPHSON JUNCTION CIRCUITS [J].

RADPARVAR, M ;

BERRY, MJ ;

DRAKE, RE ;

FARIS, SM ;

WHITELEY, SR ;

YU, LS .

IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (02) :1480-1483

[6]

Ruggiero S. T., 1990, SUPERCONDUCTING DEVI, P373

[7] NIOBIUM NITRIDE JOSEPHSON TUNNEL-JUNCTIONS WITH MAGNESIUM-OXIDE BARRIERS [J].

SHOJI, A ;

AOYAGI, M ;

KOSAKA, S ;

SHINOKI, F ;

HAYAKAWA, H .

APPLIED PHYSICS LETTERS, 1985, 46 (11) :1098-1100

[8] INSULATOR INTERFACE EFFECTS IN SPUTTER-DEPOSITED NBN/MGO/NBN (SUPERCONDUCTOR INSULATOR SUPERCONDUCTOR) TUNNEL-JUNCTIONS [J].

THAKOOR, S ;

LEDUC, HG ;

STERN, JA ;

THAKOOR, AP ;

KHANNA, SK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1721-1725