A MICROSTRUCTURAL STUDY OF INDIUM-INDIUM OXIDE COMPOSITE FILMS

被引：11

作者：

KWON, C ^{[1
]}

KIM, J ^{[1
]}

LEE, HJ ^{[1
]}

JUNG, HC ^{[1
]}

PARK, CG ^{[1
]}

机构：

[1] POHANG INST SCI & TECHNOL,DEPT MAT SCI & ENGN,POHANG 790600,SOUTH KOREA

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 09期

关键词：

D O I：

10.1063/1.348894

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated the microstructure of indium-indium oxide composite films prepared by thermal vapor deposition in the oxygen atmosphere. The films show granular-amorphous structural phase transformation near the oxygen concentration of 2 x 10(-4) Torr. Although the thermal evaporation generates films with indium grains much larger in size than the reactive sputter deposition, the film resistivity shows the characteristics of the homogeneous films as long as the thickness is larger than the grain size.

引用

页码：6716 / 6718

页数：3

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