THE TECHNOLOGY OF CHROMIUM-OXIDE PASSIVATION ON STAINLESS-STEEL SURFACE

被引：29

作者：

OHMI, T

OHKI, A

NAKAMURA, M

KAWADA, K

WATANABE, T

NAKAGAWA, Y

MIYOSHI, S

TAKAHASHI, S

CHEN, MSK

机构：

[1] Department of Electronics, Faculty of Engineering, Tohoku University

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1993年 / 140卷 / 06期

关键词：

D O I：

10.1149/1.2221625

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

A complete chromium oxide (Cr2O3) passivation technology has been developed for stainless steel surfaces for use in high purity gas-delivery systems and process chambers. Starting with an electrochemical buffing (ECB) to add to electro-polished (EP) SUS316L stainless steel material, an optimal thermal treatment was found by using a gas mixture of 10% hydrogen, 1-10 ppm oxygen and argon balance gas at 500-degrees-C for 1 h. Five-day corrosion tests with HCl gas (containing 1.4 ppm moisture) at 5 kg/cm2 and 100-degrees-C showed no sign of corrosion on the chromium oxide passivated surface. Chemical stability tests on this surface with silane specialty gas thermal decomposition also showed a remarkable noncatalytic activity compared with conventional surfaces.

引用

页码：1691 / 1699

页数：9

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