ABSORPTION OF NITROGEN AND OXYGEN BY VAPOR-DEPOSITED TANTALUM FILMS

被引:17
作者
BAUDER, U [1 ]
FROMM, E [1 ]
机构
[1] MAX PLANCK INST MET FORSCH,INST WERKSTOFF WISSENSCH,STUTTGART,FED REP GER
关键词
D O I
10.1016/0039-6028(75)90070-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:415 / 425
页数:11
相关论文
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