VOLATILITIES OF PRECURSORS FOR CHEMICAL VAPOR-DEPOSITION OF SUPERCONDUCTING THIN-FILMS

被引:30
作者
YUHYA, S
KIKUCHI, K
YOSHIDA, M
SUGAWARA, K
SHIOHARA, Y
机构
来源
MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 1990年 / 184卷
关键词
D O I
10.1080/00268949008031767
中图分类号
O6 [化学];
学科分类号
0703 ;
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页码:231 / 235
页数:5
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