DETERMINATION OF ACTIVATION-ENERGIES FOR DIAMOND GROWTH BY AN ADVANCED HOT FILAMENT CHEMICAL VAPOR-DEPOSITION METHOD

被引：64

作者：

KONDOH, E

OHTA, T

MITOMO, T

OHTSUKA, K

机构：

[1] Technical Research Division, Kawasaki Steel Corporation, Chiba 260

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 04期

关键词：

D O I：

10.1063/1.105417

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The activation energies for diamond growth were determined by an advanced hot filament chemical vapor deposition (AHF-CVD) method, which accurately controls the substrate temperature independently against other CVD parameters. The activation energies, as determined from an Arrhenius plot, were 22-24 kcal/mol in the range of 740-930-degrees-C. These values are the lowest level reported in the literature. Reported growth mechanisms were evaluated in view of the obtained activation energies.

引用

页码：488 / 490

页数：3

共 29 条

[1]

BARYAM Y, 1989, NATURE, V342

[2]

CELLI FG, 1989, APPL PHYS LETT, V54, P1031

[3]

CELLI FG, 1988, APPL PHYS LETT, V52, P2043

[4] GROWTH-MECHANISM OF VAPOR-DEPOSITED DIAMOND [J].