SURFACE MICROMACHINED SCANNING MIRRORS

被引：6

作者：

MATTSSON, KE

机构：

[1] Mikroelektronik Centret, Technical University of Denmark

来源：

MICROELECTRONIC ENGINEERING | 1992年 / 19卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(92)90422-N

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Both aluminum cantilever and torsional scanning mirrors have been fabricated and their static and dynamic properties are studied experimentally and theoretically. The experiments showed resonance frequencies in the range of 163 kHz - 632 kHz for cantilever beams with Q values between 5 and 11. Torsional mirrors showed resonance frequencies in the range of 410 kHz - 667 kHz with Q values of 10 - 17. All measurements performed at atmospheric pressure. Both types of mechanical structures were deflected electrostatically at large angles (+/- 5-degrees) more than 10(11) times without breaking and without any noticeable deterioration due to fatigue. A number of different light modulator arrays made up of adjacent devices was investigated and the measured performance parameters were in good agreement with calculations.

引用

页码：199 / 204

页数：6