STRUCTURE AND TRIBOLOGY OF HARD CARBON-FILMS SYNTHESIZED BY ION-BEAM DEPOSITION

被引:12
作者
HE, XM
LI, WZ
LI, HD
机构
[1] Department of Materials Science and Engineering, Tsinghua University Beijing
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 06期
关键词
D O I
10.1116/1.578676
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Hard carbon films were formed on Si(111) wafer and AISI 52100 steel by CH(n+) ion beam deposition with energies varied from 200 eV to 15 keV. The effects of bombarding energy of CH(n+) on the bonding structure and hardness of carbon films were investigated. The films were revealed to consist of amorphous carbon with the structure of mixed sp3 + sp2 bonding. However, it was showed that carbon films prepared under bombarding energy of 200-550 eV were much similar to diamond in the valence band structure and had more sp3 bonds. The friction and wear properties of films deposited on AISI 52100 steel were also detected and the experimental results indicated that as wear load was less or equal to 15 N, the normal wear process can steadily last with a friction coefficient of 0.1-0.15. In addition, hard carbon films were suggested to possess the self-lubricating function and good impact-resistance to enhance their antiwearing ability.
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页码:2964 / 2969
页数:6
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