CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

被引：10

作者：

CHESHIRE, RC

GRAHAM, WG

MORROW, T

KORNAS, V

DOBELE, HF

DONNELLY, K

DOWLING, DP

OBRIEN, TP

机构：

[1] UNIV ESSEN GESAMTHSCH,INST LASER & PLASMAPHYS,ESSEN,GERMANY

[2] CTR CERAM RES,DUBLIN,IRELAND

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 23期

关键词：

D O I：

10.1063/1.113706

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The ground state atomic hydrogen density in a hydrogen/acetylene discharge is compared with the diamondlike carbon (DLC) film quality as determined from in situ ellipsometry measurement of the refractive index. Two-photon laser-induced fluorescence (LIF) was employed for the detection of the ground state atomic hydrogen in the rf generated discharge. Absolute atomic hydrogen number densities were determined by calibrating the LIF detection system using a transfer standard. A direct correlation was found between the level of molecular hydrogen dissociation in the plasma and the refractive index of the DLC film.© 1995 American Institute of Physics.

引用

页码：3152 / 3154

页数：3