STABILITY OF A LATERAL-SHEARING HETERODYNE TWYMAN-GREEN INTERFEROMETER

被引:10
作者
SELIGSON, JL
CALLARI, CA
GREIVENKAMP, JE
WARD, JW
机构
关键词
D O I
10.1117/12.7973299
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A lateral-shearing heterodyne Twyman-Green interferometer was constructed to test lenses in transmission. The goal was to determine the repeatability of the measurement of the phase of the wavefront produced by the lens. A second interferometer was used to monitor the phase modulation used in the heterodyne scheme. The wavefront map was computed by a generalized least-squares procedure. Measured phase stabilities were better than 1 m lambda .
引用
收藏
页码:353 / 356
页数:4
相关论文
共 3 条
[1]   DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].
BRUNING, JH ;
HERRIOTT, DR ;
GALLAGHER, JE ;
ROSENFELD, DP ;
WHITE, AD ;
BRANGACCIO, DJ .
APPLIED OPTICS, 1974, 13 (11) :2693-2703
[2]   GENERALIZED DATA REDUCTION FOR HETERODYNE INTERFEROMETRY [J].
GREIVENKAMP, JE .
OPTICAL ENGINEERING, 1984, 23 (04) :350-352
[3]   OPTICAL FREQUENCY RESPONSE CHARACTERISTICS IN THE PRESENCE OF SPHERICAL ABERRATION MEASURED BY AN AUTOMATICALLY RECORDING INTERFEROMETRIC INSTRUMENT [J].
KELSALL, D .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 73 (471) :465-479