EFFECTS INFLUENCING THE STRUCTURAL INTEGRITY OF SEMICONDUCTORS AND THEIR ALLOYS

被引：248

作者：

SHER, A

CHEN, AB

SPICER, WE

SHIH, CK

机构：

[1] STANFORD UNIV,STANFORD,CA 94305

[2] AUBURN UNIV,AUBURN,AL 36489

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 01期

关键词：

D O I：

10.1116/1.573177

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：105 / 111

页数：7

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