ENERGY CALIBRATION OF THE 500 KV HEAVY-ION IMPLANTER IONAS

被引：348

作者：

UHRMACHER, M

PAMPUS, K

BERGMEISTER, FJ

PURSCHKE, D

LIEB, KP

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 9卷 / 02期

关键词：

D O I：

10.1016/0168-583X(85)90688-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：234 / 242

页数：9

共 27 条

[1] ENERGY-LEVELS OF LIGHT-NUCLEI A=5-10 [J].

AJZENBERGSELOVE, F .

NUCLEAR PHYSICS A, 1979, 320 (01) :1-224

[2] ENERGY-LEVELS OF LIGHT-NUCLEI A = 18-20 [J].

AJZENBERGSELOVE, F .

NUCLEAR PHYSICS A, 1983, 392 (01) :1-184

[3] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J].

AMSEL, G ;

NADAI, JP ;

DARTEMAR.E ;

DAVID, D ;

GIRARD, E ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04) :481-&

[4]

Andersen H. H., 1977, HYDROGEN STOPPING PO

[5] RANGES OF SOME LIGHT-IONS MEASURED BY (P, GAMMA) RESONANCE BROADENING [J].

ANTTILA, A ;

BISTER, M ;

FONTELL, A ;

WINTERBON, KB .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 33 (01) :13-19

[6]

BERGMEISTER FJ, Z PHYS A

[7]

BETHE HA, 1937, REV MOD PHYS, V9, P140

[8]

Biersack J.P., 1982, ION IMPLANTATION TEC

[9] THEORY OF FORMATION OF VERY THIN OXIDE FILMS ON METALS [J].

BOGGIO, JE ;

PLUMB, RC .

JOURNAL OF CHEMICAL PHYSICS, 1966, 44 (03) :1081-&

[10] THRESHOLD STATES IN AL-26 .2. EXTRACTION OF RESONANCE STRENGTHS [J].

CHAMPAGNE, AE ;

HOWARD, AJ ;

PARKER, PD .

NUCLEAR PHYSICS A, 1983, 402 (01) :179-188

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