STUDIES ON THE FULLY-AUTOMATIC HORIZONTAL LIFTING DEPOSITION OF LB FILMS USING DOUBLE GATES

被引：26

作者：

KATO, T ^{[1
]}

机构：

[1] UTSUNOMIYA UNIV, FAC ENGN, DEPT APPL CHEM, UTSUNOMIYA, TOCHIGI 321, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 07期

关键词：

D O I：

10.1143/JJAP.27.L1358

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1358 / L1360

页数：3

共 9 条

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