共 12 条
[1]
ANISOTROPIC ETCHING OF SILICON
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1978, 25 (10)
:1185-1193
[2]
KARUBE I, 1988, CHEM SENSOR TECHNOLO, V1, P195
[3]
KARUBE I, 1987, ENZYME ENG, V8, P256
[4]
KITAGAWA Y, 1987, ANAL LETT, V20, P81
[7]
STOW R W, 1957, Arch Phys Med Rehabil, V38, P646
[8]
SUZUKI H, 1988, ANAL LETT, V21, P1323
[9]
SUZUKI H, 1989, ANAL LETT, V22, P15