STRUCTURAL AND ELECTRICAL-PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY MULTITARGET REACTIVE DC MAGNETRON COSPUTTERING

被引：4

作者：

KIM, KY ^{[1
]}

KIM, ST ^{[1
]}

CHOO, WK ^{[1
]}

机构：

[1] GOLDSTAR CENT RES LABS,LAB 2,SEOUL 137140,SOUTH KOREA

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 04期

关键词：

PZT THIN FILM; MULTITARGET; REACTIVE COSPUTTERING; STRUCTURE; CHEMICAL STATE; DIELECTRIC CONSTANT;

D O I：

10.1143/JJAP.32.1700

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated the structural and electrical properties of lead-zirconate-titanate (PZT) thin films prepared on Pt/Ti/SiO2/Si substrates by multitarget reactive DC magnetron cosputtering. Film composition has been controlled by independently varying the DC power applied to the Pb, Zr and Ti targets. A single perovskite phase with a pseudocubic structure has been obtained with postannealing at 550-degrees-C in oxygen. The structure, composition and chemical state have been examined as a function of annealing temperature. The 0.65 mum- and 2.1 mum-thick films annealed at 550-degrees-C have dielectric constants of 178 and 497 at 100 kHz, remanent polarizations of 1.7 muC/cm2 and 2.4 muC/cm2 and coercive fields of 7.8 kV/cm and 8.4 kV/cm, respectively.

引用

页码：1700 / 1707

页数：8

共 19 条

[1] PREPARATION AND PROPERTIES OF (PB, LA)TIO3 EPITAXIAL THIN-FILMS BY MULTITARGET SPUTTERING [J].

ADACHI, H ;

MITSUYU, T ;

YAMAZAKI, O ;

WASA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 :13-16

[2] X-RAY STUDY OF PZT SOLID-SOLUTIONS NEAR MORPHOTROPIC PHASE-TRANSITION [J].

ARIGUR, P ;

BENGUIGUI, L .

SOLID STATE COMMUNICATIONS, 1974, 15 (06) :1077-1079

[3]

CULLITY BD, 1977, ELEMENTS XRAY DIFFRA, P363

[4]

ETZOLD KF, 1990, MATER RES SOC SYMP P, V200, P297, DOI 10.1557/PROC-200-297

[5]

HACNEY SA, 1988, SCRIPTA METALL, V22, P1731

[6] FERROELECTRIC THIN-FILMS FOR ELECTRONIC APPLICATIONS [J].

HAERTLING, GH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :414-420

[7] PREPARATION AND SWITCHING KINETICS OF PB(ZR, TI)O3 THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING [J].

HASE, T ;

SHIOSAKI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2159-2162

[8] PREPARATION OF C-AXIS ORIENTED PBTIO3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES [J].

IIJIMA, K ;

TOMITA, Y ;

TAKAYAMA, R ;

UEDA, I .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) :361-367

[9]

Jaffe B., 1971, PIEZOELECTRIC CERAMI, P135

[10] CRYSTALLIZATION OF SPUTTERED LEAD ZIRCONATE TITANATE FILMS BY RAPID THERMAL-PROCESSING [J].

KUMAR, CVRV ;

PASCUAL, R ;

SAYER, M .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (02) :864-874

← 1 2 →