ACOUSTIC-WAVE MICROSENSORS .2.

被引:134
作者
GRATE, JW
MARTIN, SJ
WHITE, RM
机构
[1] SANDIA NATL LABS, DEPT MICROSENSOR RES & DEV, ALBUQUERQUE, NM 87185 USA
[2] UNIV CALIF BERKELEY, BERKELEY SENSOR & ACTUATOR CTR, DEPT ELECT ENGN & COMP SCI, BERKELEY, CA 94720 USA
[3] UNIV CALIF BERKELEY, ELECTR RES LAB, BERKELEY, CA 94720 USA
关键词
D O I
10.1021/ac00070a002
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Acoustic wave microsensors are a versatile class of sensor with many applications. Although originally regarded as mass detectors, these sensors can also measure a variety of other physical properties at the sensor's surface. In Part I of this article, which appeared in the November 1 issue, Jay W. Grate, Stephen J. Martin, and Richard M. White discussed the types of waves and devices, operation and measurement methods, and detection via mass sensitivity. Part II will focus on sensing involving other transduction mechanisms, including sensitivity to viscoelastic thin-film properties and polymer transitions, response mechanisms of polymer-coated vapor sensors, acoustoelectric and dielectric effects, and factors influencing sensor behavior in the liquid phase. We will begin Part II with a discussion of viscoelastic thin films. © 1993, American Chemical Society. All rights reserved.
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页码:A987 / A996
页数:10
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