A TILTED-PLATE CAPACITANCE DISPLACEMENT SENSOR

被引:24
作者
GENOSSAR, J [1 ]
STEINITZ, M [1 ]
机构
[1] ST FRANCIS XAVIER UNIV,DEPT PHYS,ANTIGONISH B2G 1C0,NS,CANADA
关键词
D O I
10.1063/1.1141342
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed a capacitance displacement sensor whose novel design greatly simplifies its construction and use. It is small, compact, extremely simple, and capable of angstrom resolution. It can be used with samples of any shape, size, or dielectric constant. One variant of the design allows its use at high temperatures, where such resolution has been unattainable until now. It may also be used to detect small changes in angle.
引用
收藏
页码:2469 / 2471
页数:3
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