PROPERTIES OF AMORPHOUS TIN-NITROGEN FILMS OBTAINED VIA REACTIVE CATHODE SPUTTERING - NATURE OF METAL-NITROGEN BOND

被引:13
作者
HANTZPERGUE, JJ [1 ]
REMY, JC [1 ]
机构
[1] FAC SCI ANGERS,UER SCI & TECH,LAB PHYSICO-CHIM MIN & THERMODYNAM,BLVD LAVOISIER,49045 ANGERS,FRANCE
关键词
D O I
10.1016/0040-6090(75)90085-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:205 / 214
页数:10
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