THE IMPACT OF CLUSTERED DEFECT DISTRIBUTIONS IN IC FABRICATION

被引：30

作者：

ALBIN, SL ^{[1
]}

FRIEDMAN, DJ ^{[1
]}

机构：

[1] AT&T BELL LABS,TECH STAFF,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1287/mnsc.35.9.1066

中图分类号：

C93 [管理学];

学科分类号：

12 ; 1201 ; 1202 ; 120202 ;

摘要：

引用

页码：1066 / 1078

页数：13

共 17 条

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