RELATION OF POLYMER STRUCTURE TO PLASMA-ETCHING BEHAVIOR - ROLE OF ATOMIC FLUORINE

[1] ABELL PI, 1973, FREE RADICALS, V2, P63

[2] [Anonymous], 1970, FREE RADICAL CHAIN R

[3] DEDINAS J, 1983, 1ST P ANN INT C PLAS, P119

[4] PLASMA-ETCHING OF ORGANIC MATERIALS .1. POLYIMIDE IN O2-CF4 [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03): : 893 - 904

[5] EMMI F, 1984, 5TH P S PLASM PROC, P206

[6] Flamm D.L., 1981, PLASMA CHEM PLASMA P, V1, P317, DOI [10.1007/bf00565992, DOI 10.1007/BF00565992]

[7] EFFECT OF ATOMIC OXYGEN ON POLYMERS [J]. JOURNAL OF POLYMER SCIENCE PART A-GENERAL PAPERS, 1965, 3 (6PA): : 2205 - &

[8] HELBERT JN, 1982, ACS S SERIES, P61

[9] Hey D. H., 1967, ADVANCES FREE RADICA, VII, P47

[10] THEORY OF POLYHEDRAL MOLECULES .1. PHYSICAL FACTORIZATIONS OF SECULAR EQUATION [J]. JOURNAL OF CHEMICAL PHYSICS, 1962, 36 (08) : 2179 - &

[1] ABELL PI, 1973, FREE RADICALS, V2, P63

[2] [Anonymous], 1970, FREE RADICAL CHAIN R

[3] DEDINAS J, 1983, 1ST P ANN INT C PLAS, P119

[4] PLASMA-ETCHING OF ORGANIC MATERIALS .1. POLYIMIDE IN O2-CF4 [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03): : 893 - 904

[5] EMMI F, 1984, 5TH P S PLASM PROC, P206

[6] Flamm D.L., 1981, PLASMA CHEM PLASMA P, V1, P317, DOI [10.1007/bf00565992, DOI 10.1007/BF00565992]

[7] EFFECT OF ATOMIC OXYGEN ON POLYMERS [J]. JOURNAL OF POLYMER SCIENCE PART A-GENERAL PAPERS, 1965, 3 (6PA): : 2205 - &

[8] HELBERT JN, 1982, ACS S SERIES, P61

[9] Hey D. H., 1967, ADVANCES FREE RADICA, VII, P47

[10] THEORY OF POLYHEDRAL MOLECULES .1. PHYSICAL FACTORIZATIONS OF SECULAR EQUATION [J]. JOURNAL OF CHEMICAL PHYSICS, 1962, 36 (08) : 2179 - &