A HIGH-CURRENT, HIGH-SPEED ELECTRON-BEAM LITHOGRAPHY COLUMN

[1] CHARBONNIER FM, 1968, Patent No. 3374386

[2] ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1680 - 1685

[3] GROVES T, 1979, C VLSI ARCHITECTURE

[4] HEYNICK LN, 1969, ECOM DA28043 AMC0126

[5] KELLY J, 1977, ADV ELECTRON EL PHYS, V43, P43

[6] KUO HP, 1978, 8TH P S EL ION BEAM, P3

[7] LOEFFLER KH, 1970, 7TH INT C EL MICR GR

[8] OWEN G, 1977, ELECTRONICS ELECTRON, V43

[9] SASAKI T, 1979, C VLSI ARCHITECTURE

[10] COMPARATIVE STUDY OF ZIRCONIATED AND BUILT-UP W THERMALFIELD CATHODE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1228 - 1233

[1] CHARBONNIER FM, 1968, Patent No. 3374386

[2] ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1680 - 1685

[3] GROVES T, 1979, C VLSI ARCHITECTURE

[4] HEYNICK LN, 1969, ECOM DA28043 AMC0126

[5] KELLY J, 1977, ADV ELECTRON EL PHYS, V43, P43

[6] KUO HP, 1978, 8TH P S EL ION BEAM, P3

[7] LOEFFLER KH, 1970, 7TH INT C EL MICR GR

[8] OWEN G, 1977, ELECTRONICS ELECTRON, V43

[9] SASAKI T, 1979, C VLSI ARCHITECTURE

[10] COMPARATIVE STUDY OF ZIRCONIATED AND BUILT-UP W THERMALFIELD CATHODE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1228 - 1233