REFRACTIVE AND DIFFRACTIVE PROPERTIES OF PLANAR MICRO-OPTICAL ELEMENTS

被引:86
作者
ROSSI, M [1 ]
KUNZ, RE [1 ]
HERZIG, HP [1 ]
机构
[1] UNIV NEUCHATEL,INST MICROTECHNOL,CH-2000 NEUCHATEL,SWITZERLAND
来源
APPLIED OPTICS | 1995年 / 34卷 / 26期
关键词
D O I
10.1364/AO.34.005996
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The refractive and the diffractive properties of planar micro-optical elements are investigated. The transition between purely refractive and purely diffractive planar microlenses is numerically simulated for the example of differently designed phase-matched Fresnel elements. Results obtained from numerical simulations and experiments show that the refractive and diffractive types exhibit a distinctly different behavior in the presence of small fabrication errors or wavelength deviations. Based on these results, design rules for various applications, including low- and high-numerical-aperture lenses and hybrid refractive-diffractive elements, are derived. For a high-numerical-aperture (f/# = 1.0) lens the experimental characterization of the irradiance distribution in the image space is presented and shown to agree well with theoretical predictions.
引用
收藏
页码:5996 / 6007
页数:12
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