SEPARATE MEASUREMENTS OF SURFACE SHAPES AND REFRACTIVE-INDEX INHOMOGENEITY OF AN OPTICAL-ELEMENT USING TUNABLE-SOURCE PHASE-SHIFTING INTERFEROMETRY

A phase shifting interferometer using a tunable laser as a light source is proposed for measuring shapes of both surfaces of a glass plate and the distribution of refractive index. To separate the superimposed interfero- grams generated with many wavefronts reflected from the plate, the phase shift associated with the wavelength shift is applied in the phase shifting interferometer with unequal optical paths in testing and reference beams. A laser diode is used for the tunable light source, and the data processing for obtaining phase distribution is based on the least-squares fitting in interferograms. The rms errors of the measurements are <1/50 wavelength for the surface shape, and 10-5 of the refractive index for a 5-mm thick optical glass plate. © 1990 Optical Society of America.