INFLUENCE OF ION SPUTTERING ON AUGER-ELECTRON SPECTROSCOPY DEPTH-PROFILING OF GAAS/ALGAAS SUPERSTRUCTURE

被引:11
作者
MATSUNAGA, F
KAKIBAYASHI, H
MISHIMA, T
KAWASE, S
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 01期
关键词
D O I
10.1143/JJAP.27.149
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:149 / 150
页数:2
相关论文
共 3 条
[1]  
Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406
[2]   SIMULATION STUDIES OF A COMPOSITION ANALYSIS BY THICKNESS-FRINGE (CAT) IN AN ELECTRON-MICROSCOPE IMAGE OF GAAS/ALXGA1-XAS SUPERSTRUCTURE [J].
KAKIBAYASHI, H ;
NAGATA, F .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (11) :1644-1649
[3]   COMPOSITION DEPENDENCE OF EQUAL THICKNESS FRINGES IN AN ELECTRON-MICROSCOPE IMAGE OF GAAS/ALXGA1-XAS MULTILAYER STRUCTURE [J].
KAKIBAYASHI, H ;
NAGATA, F .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (12) :L905-L907