共 7 条
[1]
DAEHLER M, 1987, P SPIE, V765, P99
[2]
GUCKEL H, 1985, DIG TECH PAPERS INT, P364
[3]
HUFF MA, 1988, DIG TECH PAPERS SOLI, P47
[4]
MASTERANGELO CH, 1989, IEDM TECH DIG
[5]
Parameswaran A. M., 1990, SENSOR MATER, V2, P17
[6]
A NEW APPROACH FOR THE FABRICATION OF MICROMECHANICAL STRUCTURES
[J].
SENSORS AND ACTUATORS,
1989, 19 (03)
:289-307
[7]
Pritchard A. P., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V940, P144, DOI 10.1117/12.947149