HYDRODYNAMICAL ANALYSIS OF NON-LINEAR SPUTTERING YIELDS

被引：41

作者：

KITAZOE, Y ^{[1
]}

HIRAOKA, N ^{[1
]}

YAMAMURA, Y ^{[1
]}

机构：

[1] OKAYAMA COLL SCI,DEPT APPL PHYS,OKAYAMA 700,JAPAN

来源：

SURFACE SCIENCE | 1981年 / 111卷 / 03期

关键词：

D O I：

10.1016/0039-6028(81)90396-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：381 / 394

页数：14

共 31 条

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