FACTORS INFLUENCING ACCURACY OF A QUARTZ-CRYSTAL OSCILLATOR AS A THICKNESS MONITOR FOR THIN-FILM DEPOSITION

被引：11

作者：

PULKER, HK

SCHADLER, W

机构：

来源：

NUOVO CIMENTO B | 1968年 / 57卷 / 01期

关键词：

D O I：

10.1007/BF02710309

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：19 / &

共 27 条

[1]

AKISHIN AI, 1963, INSTR EXPER TECHN, V1, P144

[2]

[Anonymous], [No title captured]

[3]

Behrndt K., 1962, VACUUM, V12, P1, DOI [10.1016/0042-207X(62)90818-7, DOI 10.1016/0042-207X(62)90818-7]

[4]

BEHRNDT KH, 1961, 7 T NAT VAC S, P137

[5]

BEHRNDT KH, 1961, 7 T NAT VAC S, P87

[6]

BEHRNDT KH, 1960, 6TH AVS VAC S T, P242

[7]

BEHRNDT KH, 1962, J METALS, V14, P208

BELSER, RB .

[9]

BRUYERE JC, 1960, J PHYS-PARIS, V21, pA222

[10] SIMPLE HIGH SENSITIVITY MICROBALANCE FOR USE IN ULTRA-HIGH VACUUM [J].

HALLER, I ;

WHITE, P .