TWO-DIMENSIONAL IMPURITY PROFILING WITH EMISSION COMPUTED-TOMOGRAPHY TECHNIQUES

被引：16

作者：

GOODWINJOHANSSON, SH

SUBRAHMANYAN, R

FLOYD, CE

MASSOUD, HZ

机构：

[1] DUKE UNIV,DEPT RADIOL,DURHAM,NC 27706

[2] DUKE UNIV,DEPT ELECT ENGN,DURHAM,NC 27706

来源：

IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS | 1989年 / 8卷 / 04期

关键词：

D O I：

10.1109/43.29587

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：323 / 335

页数：13

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