ADHESION OF FILMS OF MOS2 TO OXIDIZED METAL-SURFACES

被引：5

作者：

STUPIAN, GW ^{[1
]}

CHASE, AB ^{[1
]}

机构：

[1] AEROSPACE CORP,IVAN A GETTING LABS,EL SEGUNDO,CA 90245

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 05期

关键词：

D O I：

10.1116/1.569347

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1146 / 1152

页数：7

共 16 条

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