PRECISE DETERMINATION OF OPEN CIRCUIT CAPACITANCE OF COPLANAR PROBES FOR ON-WAFER AUTOMATIC NETWORK ANALYZER MEASUREMENTS

被引：3

作者：

CROZAT, P

HENAUX, JC

VERNET, G

机构：

[1] Institut d'Electronique Fondamentale, Universite Paris, CNRS URA22, Bat 220, Sud 91405, Orsay

来源：

ELECTRONICS LETTERS | 1991年 / 27卷 / 16期

关键词：

CALIBRATION; PROBES; MEASUREMENT;

D O I：

10.1049/el:19910924

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

When coplanar probes are used, the open circuit reflection standard in the SOLT calibration technique is usually the most questionable of the four. This standard is described in the 'cal kit' as a capacitance, the value of which is determined in a 'cut and try' way. A more direct method is proposed in this Letter.

引用

页码：1476 / 1478

页数：3