THERMAL-BEHAVIOR OF CARBON NITRIDE AND TIN/NBN SUPERLATTICE FILMS

被引：38

作者：

LOPEZ, S ^{[1
]}

WONG, MS ^{[1
]}

SPROUL, WD ^{[1
]}

机构：

[1] NORTHWESTERN UNIV,BASIC IND RES LAB,EVANSTON,IL 60201

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579745

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1644 / 1648

页数：5

共 21 条

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[9] ULTRAHARD COATINGS FROM TI-BN MULTILAYERS AND BY COSPUTTERING [J].

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