ION AND NEUTRAL ATOMIC AND CLUSTER SPUTTERING YIELDS OF MOLYBDENUM

被引：19

作者：

PELLIN, MJ ^{[1
]}

HUSINSKY, W ^{[1
]}

CALAWAY, WF ^{[1
]}

BURNETT, JW ^{[1
]}

SCHWEITZER, EL ^{[1
]}

YOUNG, CE ^{[1
]}

JORGENSEN, B ^{[1
]}

GRUEN, DM ^{[1
]}

机构：

[1] ARGONNE NATL LAB,DIV CHEM,ARGONNE,IL 60439

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.583659

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1477 / 1481

页数：5

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