(Y-ER)-BA-CU-O SUPERCONDUCTING THIN-FILMS OBTAINED EXSITU - TOWARD SUBMICROMETRIC PATTERNING BY ELECTRON-BEAM LITHOGRAPHY

被引：1

作者：

COCCIOLO, P ^{[1
]}

GENTILI, M ^{[1
]}

GIOVANNELLA, C ^{[1
]}

IANNUZZI, M ^{[1
]}

LUCIANI, L ^{[1
]}

MERLO, V ^{[1
]}

MESSI, R ^{[1
]}

PAOLUZI, L ^{[1
]}

机构：

[1] CNR,IST ELECTRON STATO SOLIDO,I-00156 ROME,ITALY

来源：

JOURNAL OF THE LESS-COMMON METALS | 1990年 / 164卷

关键词：

D O I：

10.1016/0022-5088(90)90236-D

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have grown (Y-Er)BaCuO superconducting thin films on SrTiO3, with thicknesses ranging from 250 to 7500 A. The superconducting films have been obtained from amorphous precursors deposited by rf magnetron sputtering from a single mosaic target made of (Y-Er), BaF2. An ex-situ annealing procedure has been used. The critical temperatures depend on their structural connectivity and thickness. The choice of performing the annealing ex-situ made possible to write, by using the electron beam lithography and the lift-off technique, test lines as narrow as 130. nm for the precursor film and useful bridges in the range of one micron for the annealed sample. © 1990.

引用

页码：374 / 382

页数：9