PROPAGATION LOSS CHARACTERISTICS OF LONG SILICA-BASED OPTICAL WAVE-GUIDES ON 5-INCH SI-WAFERS

被引:25
作者
HIBINO, Y
OKAZAKI, H
HIDA, Y
OHMORI, Y
机构
[1] NTT Optoelectronics Laboratories, Tokai
关键词
OPTICAL LOSS MEASUREMENT; OPTICAL WAVE-GUIDES;
D O I
10.1049/el:19931229
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The propagation loss characteristics of silica-based optical waveguides with various bending curvatures fabricated on 5 inch Si wafers are investigated. Low loss waveguides more than 1 m long with a delta of 0.75% are successfully fabricated and the loss is found to be independent of the curvature radius over 5mm. A minimum loss of 3.5 dB/m at approximately 1.55 mum is obtained in a waveguide 1.6m long.
引用
收藏
页码:1847 / 1848
页数:2
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