Ultrasonic transducer with silicon: A well known material with new applications

被引：1

作者：

Paneva, R ^{[1
]}

Temmel, G ^{[1
]}

Ryssel, H ^{[1
]}

机构：

[1] FRAUNHOFER INST INTEGRATED CIRCUITS,D-91058 ERLANGEN,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 51卷 / 01期

关键词：

silicon; ultrasonic transducer; vibration;

D O I：

10.1016/0924-4247(96)80054-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The vibrations of piezoelectric driven (ZnO) thin Si membranes up to 200 kHz are studied. Non-linear vibrations with amplitudes of a couple of micrometers for subharmonic frequency produce considerable ultrasonic radiation. The application of the discussed structure as a liquid nebulizer is investigated. A high mode vibration with a large amplitude is a necessary condition for the generation of surface acoustic waves (SAW) in the liquid film and drop formation.

引用

页码：67 / 70

页数：4