共 11 条
[2]
BESCOCKE KH, 1988, J VAC SCI TECHNOL A, V6, P408
[5]
SURFACE-ROUGHNESS SCATTERING AT THE SI-SIO2 INTERFACE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (03)
:803-808
[8]
MAY A, 1965, SEMICONDUCTOR SURFAC, P92