AN IMPROVED METHOD FOR NUMERICAL-ANALYSIS OF POINT ELECTRON AND ION-SOURCE OPTICS

被引：23

作者：

KANG, NK

ORLOFF, J

SWANSON, LW

TUGGLE, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571172

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1077 / 1081

页数：5

共 9 条

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