ANODIC OXIDATION OF SILICON - EFFECTS OF WATER ON OXIDE PROPERTIES

[1] AGIUS B, 1968, THESIS ORSAY

[2] AMSEL G, TO BE PUBLISHED

[3] DIELECTRIC PROPERTIES OF THIN FILMS OF ALUMINIUM OXIDE AND SILICON OXIDE [J]. THIN SOLID FILMS, 1968, 2 (03) : 185 - &

[4] TRACER EVALUATION OF HYDROGEN IN STEAM-GROWN SIO2 FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (2P1) : 196 - &

[5] BURKHARDT PJ, 1966, T ELECTRON DEVICES, VED13, P268

[6] CHERKI C, 1970, PHYS STATUS SOLIDI A, V2

[7] Daniel V., 1967, DIELECTRIC RELAXATIO

[8] A-C PROPERTIES OF ANODIC OXIDE FILMS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (11) : 1210 - +

[9] FOWKES FM, 1966, FALL M EL SOC, V175

[10] CHARGE MOTION ON SILICON OXIDE SURFACES [J]. SURFACE SCIENCE, 1967, 6 (04) : 440 - +

[1] AGIUS B, 1968, THESIS ORSAY

[2] AMSEL G, TO BE PUBLISHED

[3] DIELECTRIC PROPERTIES OF THIN FILMS OF ALUMINIUM OXIDE AND SILICON OXIDE [J]. THIN SOLID FILMS, 1968, 2 (03) : 185 - &

[4] TRACER EVALUATION OF HYDROGEN IN STEAM-GROWN SIO2 FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (2P1) : 196 - &

[5] BURKHARDT PJ, 1966, T ELECTRON DEVICES, VED13, P268

[6] CHERKI C, 1970, PHYS STATUS SOLIDI A, V2

[7] Daniel V., 1967, DIELECTRIC RELAXATIO

[8] A-C PROPERTIES OF ANODIC OXIDE FILMS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (11) : 1210 - +

[9] FOWKES FM, 1966, FALL M EL SOC, V175

[10] CHARGE MOTION ON SILICON OXIDE SURFACES [J]. SURFACE SCIENCE, 1967, 6 (04) : 440 - +