MUTUAL INTERACTION BETWEEN MICROPLASMAS IN SILICON P-N JUNCTIONS

被引：19

作者：

RUGE, I

KEIL, G

机构：

来源：

关键词：

D O I：

10.1063/1.1729183

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3306 / &

共 8 条

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[2]

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[3]

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[6] MICROPLASMAS IN SILICON [J].

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[7]

RUGE I, TO BE PUBLISHED

[8] BREAKDOWN IN SILICON [J].

SENITZKY, B ;

MOLL, JL .

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