COMPARISON OF MICROWAVE AND LOWER FREQUENCY DISCHARGES FOR PLASMA POLYMERIZATION

被引：22

作者：

CLAUDE, R

MOISAN, M

WERTHEIMER, MR

ZAKRZEWSKI, Z

机构：

[1] ECOLE POLYTECH, COUCHES MINCES GRP, CP 6079, SUCCURSALE A, MONTREAL H3C 3A7, QUEBEC, CANADA

[2] UNIV MONTREAL, DEPT PHYS, MONTREAL H3C 3J7, QUEBEC, CANADA

[3] ECOLE POLYTECH, DEPT GENIE PHYS, MONTREAL H3C 3A7, QUEBEC, CANADA

[4] POLISH ACAD SCI, IMP, PL-80952 GDANSK, POLAND

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 25期

关键词：

D O I：

10.1063/1.97700

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1797 / 1799

页数：3

共 14 条

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[4]

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[5]

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ZAKRZEWSKI, Z .

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[7] THEORY AND CHARACTERISTICS OF AN EFFICIENT SURFACE-WAVE LAUNCHER (SURFATRON) PRODUCING LONG PLASMA COLUMNS [J].

MOISAN, M ;

ZAKRZEWSKI, Z ;

PANTEL, R .

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[8]

MOISAN M, 1986, NATO ADV STUDY I S B, V149, P381

[9]

MOISAN M, 1908, Patent No. 903519

[10] A HIGH-FREQUENCY SURFACE-WAVE PUMPED HE-NE-LASER [J].

MOUTOULAS, C ;

MOISAN, M ;

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HUBERT, J ;

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RICARD, A .

APPLIED PHYSICS LETTERS, 1985, 46 (04) :323-325

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