RESULTS OF MONOLITHIC INTEGRATION OF OPTICAL WAVE-GUIDES, PHOTODIODES AND CMOS CIRCUITS ON SILICON

被引：10

作者：

HILLERINGMANN, U

GOSER, K

机构：

[1] University of Dortmund, Faculty of Electrical Engineering, 4600 Dortmund 50

来源：

MICROELECTRONIC ENGINEERING | 1992年 / 19卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(92)90425-Q

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Optical devices like waveguides, beam splitters and Mach-Zehnder interferometers are integrated on silicon substrate. To reduce the silicon area necessary for waveguide curvatures integrated mirrors are applied. The optical components are coupled to CMOS amplifiers and digital circuits via photodetectors in a monolithic integration technique on a single silicon chip. Measurement results of the optical structures, the coupling characteristics of waveguides to photodiodes and of complete system operation are given.

引用

页码：211 / 214

页数：4

共 7 条

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