MATRIX EFFECT IN QUANTITATIVE AUGER ANALYSIS OF BINARY-ALLOYS - COMPARISON BETWEEN THE MEASURED AND THE CALCULATED VALUES

被引:13
作者
LI, RS
LI, CF
机构
[1] Institute of Metal Research, Academia Sinica
关键词
D O I
10.1016/0039-6028(90)90213-R
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Matrix factors in quantitative AES analyses of binary alloys of AlNi, AuCu, AuNi, CuNi, CuPt and NiPt were studied. Using the in-situ scraping method, matrix factors were experimentally determined with an accuracy better than 5% or 10%. For comparison, matrix factors were calculated using the methods of: Reuter and Seah and Dench (R-SD); Reuter and Tokutaka, Nishimori and Hayashi (R-TNH); Reuter and Tanuma, Powell and Penn (R-TPP); Shimizu and Ichimura and Seah and Dench (SISD); SITNH and SITPP. By comparing the calculated values with the experimental results, we conclude that, the choice of the backscattering factor data, either after R or after SI, only marginally affects the resulting matrix effect despite the fact that their data differ considerably from each other. The most important effect stems from the choice of escape depth. When SD's data are adopted, the calculated values differ significantly from the experimental results except in the case of CuNi. By comparison, when TNH's data (in all of the studied cases) or TPP's data (except in the case of Al-Ni) are adopted, the calculated values are in good agreement with the observed values. This result also implies that the escape depth of Auger electrons depends on the materials in the manner suggested by TNH and TPP rather than the one suggested by SD. © 1990.
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页码:433 / 443
页数:11
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