INVESTIGATIONS OF THE THERMAL-REACTIONS OF CHLORINE ON THE GAAS(100) SURFACE

被引：35

作者：

FRENCH, CL

BALCH, WS

FOORD, JS

机构：

[1] Physical Chemistry Laboratory, University of Oxford, Oxford OX1 3QZ, South Parks Road

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1991年 / 3卷

关键词：

D O I：

10.1088/0953-8984/3/S/054

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The thermal reactions Of Cl2 with the GaAs(100) surface were studied using XPS, LEED and thermal desorption spectroscopy. Chlorine uptake at 175 K is initially very rapid, but an extensive corrosion phase is not formed. Five thermal desorption features are seen, with cracking patterns corresponding to GaCl, As2, GaCl3, Cl2, and AsCl3. The implications for the thermal etching of gallium arsenide are discussed.

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页码：S351 / S355

页数：5

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