COLUMNAR STRUCTURE AND TEXTURE OF IRON FILMS EVAPORATED AT OBLIQUE-INCIDENCE

The shape and crystallographic orientation of crystallites in Fe films prepared at evaporation rates, 50 nm/min, 250 nm/mm and 1 mu m/min, have been examined. The incidence angle and the substrate temperature are 45 and 200 degree C, respectively. Regardless of different evaporation rates, the columnar structure was observed and the inclination angle of the column axis was about 30 degree off from the film normal to the vapor beam direction. The top shape of columns appearing on the film surface depends on the evaporations rate and four kinds of shapes were discriminated. The film texture depends on the evaporation rate. The top of a columnar grain is surrounded by left brace 110 right brace planes.