FABRICATION OF RF-SPUTTERED BARIUM TITANATE THIN FILMS

被引：46

作者：

PRATT, IH

FIRESTONE, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 01期

关键词：

D O I：

10.1116/1.1316300

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：256 / +

页数：1

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[2]

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[3]

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[4]

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[5]

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[9] FERROELECTRICS OF ULTRAFINE PARTICLE SIZE .1. SYNTHESIS OF TITANATE POWDERS OF ULTRAFINE PARTICLE SIZE [J].

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[10] FERROELECTRICS OF ULTRAFINE PARTICLE SIZE .3. THIN BARIUM TITANATE LAYERS FOR CAPACITORS [J].

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